Anming Hu (editor) - Laser Micro-Nano-Manufacturing and 3D Microprinting (Springer Series in Materials Science, 309)

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Manufacturing is the basis of modern economics and society. The modern pursuit of high quality of life requires the revolution of modern manufacturing and engineering to produce products with unprecedented complex structures and properties. Reducing the costs in materials and energy, and enhancing freedom in design while continuously improving the performance at the device and system level remain major technological challenges. Micro- and nano-manufacturing, especially 2D and 3D microprinting, has emerged as effective solutions for the development of the Internet of things (IoTs), 5G/6G communication, portable electronics, artificial intelligence, and automated driving.

Lasers are powerful tools for various machining processes. For precision manufacturing at a micro-to-nano-scale, the fundamental understanding of light-nanomaterial interaction is crucial. The basic energy and mass transporting govern the relevant machining procedures. Unlike the macroworld, the unique properties and principles will be dominant in a microworld and nanoworld, such as the surface energy becomes dominant compared to volume energy and capillary force will overcome the gravitational force. This leads to the size effect of melting and innovative assembly strategy of nanomaterials. These must be further considered in precision micro-to-nano-manufacturing. On the other hand, with the blooming of laser technologies, laser enables work using tunable wavelengths, pulses, shapes, powers and other processing parameters. Especially due to the extensive availability of cheaper semiconductor laser and fiber laser, laser-based manufacturing becomes versatile in 2D-3D printing. Moreover, laser-based micro-nano-manufacturing can be integrated with other advanced manufacturing tools to address intellectual and green manufacturing. This makes laser-based micro-nano-manufacturing very unique and promising for microelectronics, energy, environment application.

In this book, we first introduce the fundamental of light-nanomaterial interaction, the size effect, the scaling of nanomaterials, and the surface plasmonic excitation of nanomaterials. For photonic manufacturing, we mainly compare the photothermal effect induced by long pules (long than 1 picosecond) or continue wave laser to the nonthermal effect induced by an ultrafast pulsed laser (shorter than 1 picosecond). Subsequently, we review two kinds of key techniques for micro-to-nano-manufacturing: various micro-to-nano-manipulations and nanojoining. Based on these reviews, we introduce the latest progress on innovative molecular devices, near-field manufacturing, and super-resolution manufacturing.

In Chap. , Minlin Zhong and Peixun Fan present a comprehensive overview of the state of the art and current challenges of antireflection surface micro-nano-structures (SMNS), especially those fabricated by laser. The antireflection performances of the fabricated SMNS demonstrate in detail different multiscale structures. They also discuss the great application prospects of these SMNS.

In Chap. , Casas and Kautek focus on one potential approach to surpass the optical diffraction limit by introducing Apertureless Scanning Near-Field Optical Lithography. In this method, a scanning probe microscope tip is illuminated by a focused laser beam and the electromagnetic field is strongly enhanced in the vicinity of the tips apex. This may generate nanomodifications on a solid surface in close proximity to the tip. In this chapter, they review the thermal effects that allow distinguishing the underlying physical mechanisms: near-field optical enhancement and/or thermal surface modification.

In Chap. , Compagnini et al. review the basic principles of pulsed laser-induced nanoparticle synthesis in liquid. Two kinds of materials are focused as case studies, porous graphene, and TiO2 nanoparticles. Biosensing and photocatalytic degradation by these materials are discussed.