Karl Jousten - Handbook of Vacuum Technology: Second, Completely Revised and Updated Edition

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Print ISBN: 978-3-527-41338-6

ePDF ISBN: 978-3-527-68825-8

ePub ISBN: 978-3-527-68824-1

Mobi ISBN: 978-3-527-68823-4

oBook ISBN: 978-3-527-68826-5

In 2008, Wiley-VCH published a translation of the ninth edition of the German handbook Wutz Handbook of Vacuum Technology, named after the author of the first edition Max Wutz. This book has been a great success for five decades and the object of many requests for a translation. Since its second edition, the Wutz Handbook of Vacuum Technology has become a multi-author book covering the field of vacuum science, vacuum technology, and vacuum techniques comprehensively. Since 2008, the German handbook underwent significant changes and when it could be foreseen that the English edition would run out of print, Wiley-VCH suggested to issue a second English edition Handbook of Vacuum Technology, which is a translation of the 11th German edition of the Wutz Handbook of Vacuum Technology, published by Springer Vieweg. were written by new authors while improvements were made in most of the other chapters according to the changes in techniques.

Although multi-author, the book aims to be read as a single-author work, a goal to which the present editor who himself has revised almost half of the content has stringently adhered to. The style is as uniform as possible, there are only recurrences where necessary, and the same symbols and notation are used throughout. Hence, the book has taken on textbook character, though it was originally intended to be used as a technical handbook.

The main idea of the book is to cover all aspects of vacuum science and technology in order to enable engineers, technicians, and scientists to develop and work successfully with the equipment and environment of vacuum. Beginners in the field of vacuum shall be able to start and experts shall be able to deepen their knowledge and find the necessary information and data to continue their work.

Despite the fact that the applications of vacuum technology are steadily increasing both quantitatively and qualitatively note, for instance, that the next chip generation will be illuminated under vacuum by extreme ultraviolet (EUV) lithography the number of scientists researching and teaching in the field is on a steady decline. Thus, another task for a book like this is to both preserve the knowledge of vacuum science and technology and enable self-studying in the field. For this reason, the book may be at times too introductive and simple for experts and sometimes too specialized for beginners. The reader should not be discouraged when experiencing this, but rather choose the information as his/her personal level requires. Short explanations following the title of each chapter describe the contents and may help the reader to choose the right chapter for his/her needs.

We hope that also this second edition will be helpful to all readers of English interested in a comprehensive and up-to-date overview in the field of vacuum technology including its underlying science.

Even after many people read drafts and proofs, there will always be mistakes in a book of this size. If you discover such or if you have any suggestions for improvements, please send an email to the editor (). I will be glad to consider your suggestions in future editions.

June 2015

Karl Jousten

Berlin, Germany

Dr. Karl Jousten

Physikalisch-Technische Bundesanstalt, Vacuum Metrology, Abbestr. 2-12, 10587, Berlin, Germany

In old Greece, before the time of Socrates, the philosophers searched for the constancy in the world, that is, what is behind the daily experience. The Greek philosopher Democritus (circa 460 to 375 BC) () assumed that the world was made up of many small and undividable particles that he called atoms (atomos, Greek: undividable). In between the atoms, Democritus presumed empty space (a kind of microvacuum) through which the atoms moved according to the general laws of mechanics. Variations in shape, orientation, and arrangement of the atoms would cause variations of macroscopic objects. Acknowledging this philosophy, Democritus, together with his teacher Leucippus, may be considered as the inventor of the concept of vacuum. For them, the empty space was the precondition for the variety of our world, since it allowed the atoms to move about and arrange themselves freely. Our modern view of physics corresponds very closely to this idea of Democritus. However, his philosophy did not dominate the way of thinking until the sixteenth century.

Democritus. Bronze statue around 250 BC, National Museum in Naples.

It was Aristotle's (384 to 322 BC) philosophy that prevailed throughout the Middle Ages and until the beginning of modern times. In his book Physica [1], around 330 BC, Aristotle denied the existence of an empty space. Where there is nothing, space could not be defined. For this reason, no vacuum (Latin: empty space, emptiness) could exist in nature. According to his philosophy, nature consisted of water, earth, air, and fire. The lightest of these four elements, fire, is directed upward, whereas the heaviest, earth, downward. Additionally, nature would forbid vacuum since neither up nor down could be defined within it. Around 1300, the medieval scholastics began to speak of a horror vacui, meaning nature's fear of vacuum. Nature would abhor vacuum and wherever such a vacuum may be on the verge to develop, nature would fill it immediately.

Around 1600, however, the possibility or impossibility of an evacuated volume without any matter was a much-debated issue within the scientificphilosophical community of Italy, and later in France and Germany as well. This happened at the time when the first scientists were burnt at the stake (Bruno in 1600).

In 1613, Galileo Galilei in Florence attempted to measure the weight and density of air. He determined the weight of a glass flask containing either compressed air, air at atmospheric pressure, or water. He found a value of