K. A. Jose - RF Mems and Their Applications

Cover

Page i

RF MEMS
and Their Applications

Page ii

This page intentionally left blank.

Page iii

Vijay K. Varadan
K.J. Vinoy
K.A. Jose
Pennsylvania State University, USA

Page iv

Email (for orders and customer service enquiries): cs-books@wiley.co.uk
Visit our Home Page on www.wileyeurope.com or www.wiley.com

Reprinted April 2003

All Rights Reserved. No part of this publication may be reproduced, stored in a retrieval system or transmitted in any form or by any means, electronic, mechanical, photocopying, recording, scanning or otherwise, except under the terms of the Copyright, Designs and Patents Act 1988 or under the terms of a licence issued by the Copyright Licensing Agency Ltd, 90 Tottenham Court Road, London W1T 4LP, UK, without the permission in writing of the Publisher. Requests to the Publisher should be addressed to the Permissions Department, John Wiley & Sons Ltd, The Atrium, Southern Gate, Chichester, West Sussex PO19 8SQ, England, or emailed to permreq@wiley.co.uk, or faxed to (+44) 1243 770620.

This publication is designed to provide accurate and authoritative information in regard to the subject matter covered. It is sold on the understanding that the Publisher is not engaged in rendering professional services. If professional advice or other expert assistance is required, the services of a competent professional should be sought.

Other Wiley Editorial Offices

John Wiley & Sons Inc., 111 River Street, Hoboken, NJ 07030, USA

Jossey-Bass, 989 Market Street, San Francisco, CA 94103-1741, USA

Wiley-VCH Verlag GmbH, Boschstr. 12, D-69469 Weinheim, Germany

John Wiley & Sons Australia Ltd, 33 Park Road, Milton, Queensland 4064, Australia

John Wiley & Sons (Asia) Pte Ltd, 2 Clementi Loop #02-01, Jin Xing Distripark, Singapore 129809

John Wiley & Sons Canada Ltd, 22 Worcester Road, Etobicoke, Ontario, Canada M9W 1L1

Wiley also publishes its books in a variety of electronic formats. Some content that appears in print may not be available in electronic books.

Library of Congress Cataloging-in-Publication Data
Varadan, V.K., 1943
RF MEMS and their applications / Vijay K. Varadan, K.J. Vinoy, and K.A. Jose.
Includes bibliographical references and index.
ISBN 0-470-84308-X (alk. paper)
1. Radio circuits-Equipment and supplies. 2. Microelectromechanical systems. 3. Microwave
circuits. I. Vinoy, K.J. (Kalarickaparambil Joseph), 1969 II. Jose K. Abraham. III. Title.
TK6560.V33 2002
621.384'13-dc21 2002071393

British Library Cataloguing in Publication Data

A catalogue record for this book is available from the British Library

ISBN 0-470-84308-X

Typeset in 10/12pt Times by Laserwords Private Limited, Chennai, India
Printed and bound in Great Britain by Biddles Ltd, Guildford and King's Lynn
This book is printed on acid-free paper responsibly manufactured from sustainable forestry in which at least two trees are planted for each one used for paper production.

Page v

Page vi