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Preparation of Thin Films provides a comprehensive account of various deposition techniques for the preparation of thin films of elements, compounds, alloys, ceramics, and semiconductors - emphasizing inorganic compound thin films and discussing high vacuum and chemical deposition methods used for preparing high temperature superconducting oxide thin films.
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Cochin University of Science and Technology Cochin, Kerala, India
Page ii
Library of Congress Cataloging-in-Publication Data George, Joy. Preparation of thin films / Joy George. p. cm. Includes bibliographical references and index. ISBN 0-8247-8196-1 1. Thin films. 2. Surface chemistry. 3. Vapor-plating. I. Title. QC176.83.G46 1992 621.381'52dc20 91-46019 CIP
This book is printed on acid-free paper.
Copyright 1992 by MARCEL DEKKER, INC. All Rights Reserved
Neither this book nor any part may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying, microfilming, and recording, or by any information storage and retrieval system, without permission in writing from the publisher.
MARCEL DEKKER, INC. 270 Madison Avenue, New York, New York 10016
In loving memory of my beloved daughter SUMA ANIL MATHEW Lecturer 19801986 Faculty of Home Science B.C.M. College, Kottayam Kerala, India
Page v
Preface
Applications of thin films in optics and electronics have made extraordinarily rapid progress in recent years. Consequently, the development of deposition techniques for the preparation of thin films with controlled, reproducible, and well-defined properties plays an increasingly important role in technological applications. Since the advent of the early thermal evaporation techniques, a wide variety of deposition methods for elemental and compound/alloy films has been developed.
Thin film deposition technology is still undergoing rapid progress, and although several books in the area of deposition technology have been published at regular intervals over the past 30 years, most describe only selected deposition processes and techniques. In writing this book, however, I have attempted to bring together in a single volume the various deposition techniques, mostly of inorganic compound thin films. Details presented in earlier books are included for continuity only, and over 1000 references are cited for more exhaustive details.
No excuse is made for the fact that several of the techniques described in the book are not of "industrial scale." Production-oriented preparation techniques are given second priority, the primary audience of the book being research scientists in the area of materials science and university postgraduate students.
Although I am fortunate in having contributed to the field of thin films during my professional career, part of the book's content is the result of the work of others, and references are made in the text at appropriate places.
In writing this book, I have found the continuing support and encouragement of my past and present Ph.D. research students to be most helpful and stimulating.
Page vi
Thanks are due to my wife and children for the patience and understanding they have shown during the course of the work.
JOY GEORGE
Page vii
Contents
Preface
v
Introduction
viii
1. Vacuum Evaporation
1
2. Sputtering
41
3. Ion Beam and Ion-Assisted Deposition
101
4. Reactive Deposition Techniques
141
5. Ionized Cluster Beam Methods
207
6. Chemical Methods of Film Deposition
223
7. Epitaxial Film Deposition Techniques
303
8. Other Methods of Film Deposition
335
9. Summary
353
Index
367
Page viii
Introduction
The real purpose of books is to trap the mind into doing its own thinking. Christopher Morley
Any solid or liquid object with one of its dimensions very much less than that of the other two may be called a "thin film." The most commonly observed phenomenon associated with thin films, which attracted the attention of physicists as early as the second half of the seventeenth century, is the fascinating colors on a thin film of oil floating on the surface of water.
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