K. L. Mittal - Particles on surfaces 4 : detection, adhesion, and removal

Cover

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PARTICLES
ON
SURFACES

Detection, Adhesion, and Removal

edited by
K. L. Mittal
Skill Dynamics, an IBM Company
Thornwood, New York

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ISBN: 0-8247-9535-0

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Copyright 1995 by Marcel Dekker, Inc. All Rights Reserved.

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This volume embodies the proceedings of the Fourth Symposium on Particles on Surfaces: Detection, Adhesion and Removal held as a part of the 23rd Annual meeting of the Fine Particle Society in Las Vegas, Nevada, July 1317, 1992. The previous three symposia in this biennial series of events were held in 1986, 1988, and 1990 and the proceedings of which have been documented.

As pointed out in the prefaces to the earlier volumes on this topic, the subject of particle detection, adhesion and removal is of great importance in many technologies, and there has been an intensified effort in ameliorating the existing ones and/or in devising new ways to remove particles from a host of substrates. The objectives of this symposium were analogous to those of earlier events, and our intent here was to provide an update on the research and development activities in the domain of particles on surfaces. The program consisted of 39 invited and contributed papers and many ramifications of particles on surfaces were discussed. During the symposium, there were brisk discussions (both formally and informally).

This volume contains a total of 23 papers. The topics covered include: adhesion induced deformations of particles on surfaces; the use of atomic force microscopy in probing particleparticle adhesion; particle contamination in microelectronics, on spacecraft, and on optical surfaces; the role of air ionization in reducing surface contamination by particles in the cleanroom; abrasive blasting media for contamination-free deburring process; particle generation and control in tubing and piping connection design; various methods (light scattering, spectroscopic, x-ray fluorescence, etc.) for

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detection, identification, analysis, and characterization of particles on silicon and other surfaces; the use of focused acoustic waves to interrogate the behavior of particles on surfaces; various ways (sonication, spray impingement, liquid jets, fluorocarbon surfactant solutions, and laser cleaning) to remove particles from a variety of surfaces.

The papers included in this book were thoroughly subjected to rigorous peer review, and all were revised (some quite considerably) before inclusion in this book. Thus, this book is not a mere collection of unreviewed papers but represents information that has passed peer scrutiny.

This and the earlier three volumes offer a fountain of information concerning particles on surfaces and I sincerely hope that anyone with serious or even tangential interest in this topic will find this volume useful.

Now comes the pleasant task of thanking those who helped in one way or another. First, I am thankful to the Fine Particle Society for sponsoring this event. Thanks are also due to the appropriate management of Skill Dynamics, an IBM Company, for allowing me to organize the symposium and edit this volume. My special appreciation goes to my wife, Usha, for assuming the role of secretary and carrying out, without complaint, the various chores involved. I would be remiss if I failed to acknowledge the time, efforts, and valuable comments of the reviewers. Of course, without the contribution, sustained interest, and enthusiasm of the authors, this book could not have been born.

K. L. Mittal

1. K. L. Mittal (ed.), Particles on Surfaces 1: Detection, Adhesion and Removal, Plenum Press, New York (1988).

2. K. L. Mittal (ed.), Particles on Surfaces 2: Detection, Adhesion and Removal, Plenum Press, New York (1989).

3. K. L. Mittal (ed.), Particles on Surfaces 3: Detection, Adhesion and Removal, Plenum Press, New York (1991).

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